JPH01169247U - - Google Patents
Info
- Publication number
- JPH01169247U JPH01169247U JP6634788U JP6634788U JPH01169247U JP H01169247 U JPH01169247 U JP H01169247U JP 6634788 U JP6634788 U JP 6634788U JP 6634788 U JP6634788 U JP 6634788U JP H01169247 U JPH01169247 U JP H01169247U
- Authority
- JP
- Japan
- Prior art keywords
- cup
- coating apparatus
- wafer
- lid body
- resist coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6634788U JPH01169247U (en]) | 1988-05-18 | 1988-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6634788U JPH01169247U (en]) | 1988-05-18 | 1988-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01169247U true JPH01169247U (en]) | 1989-11-29 |
Family
ID=31291754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6634788U Pending JPH01169247U (en]) | 1988-05-18 | 1988-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01169247U (en]) |
-
1988
- 1988-05-18 JP JP6634788U patent/JPH01169247U/ja active Pending